无油式真空泵的结构特点及安装维护注意点      清洁的真空环境一直是科学家和企业界追求的理想真空环境.自能够创造真空环境开始,人们就试图采用不同手段达到清洁真空的效果.时至今日,清洁真空获得设备已经发展到冷凝泵、住赛泵、爪式泵、涡旋泵以及隔膜泵等多种产品。在现有的无油真空泵当中,无油涡旋真空泵与其他种类的无油真空泵相比具有下述特点:     ①.无油，无摩擦——真空腔内无油，非接触，无磨损，不产生微粒尘埃污染，可获得清洁真空；    ②.抽气量大——双涡旋盘，结构与单级相比相同直径泵抽气容积为2倍，节省能源；    ③.抽气效率高——带有3-4个抽气单元，压差小；大气与真空之间由O型圈密封，泄漏低；    ④.非接触,良好平衡,力矩影响小，噪音低，振动小；    ⑤.结构简单紧凑，相同尺寸下，运动半径小，运行平稳；   ⑥.体积小，维修方便，维护费用低；   ⑦.采用空气冷却，无需水冷。   无油涡旋真空泵应用在    ①.半导体行业——薄膜制备设备、半导体器件封装设备；    ②.科学仪器行业——同步辐射光束线、电子显微镜、分析测试仪器；   ③.机械设备行业——材料制备设备、真空检测、材料提纯设备；   ④.化学工业；    ⑤．医疗设备——牙科仪器、透析机、生物制品与药品制备；   ⑥．包装行业——食品、药品、生物制品等包装设备。   无油涡旋真空泵主要由5个部件组成：   ①．动静涡旋盘付与基座；   ②．曲轴；   ③．密封垫；   ④．防自转机构；   ⑤．电机。    无油涡旋真空泵的涡旋盘就是一个一端与一个平面相接的一个或几个渐开线螺旋形成的一个涡旋型盘状结构体。一个静涡旋盘与一个动涡旋盘相互交*组装在一 起，两者之间由防自转机构保证180。相位差，这样结合组成的一对涡旋盘付构成了无油涡旋真空泵的基本抽气机构。静涡旋盘与动涡旋盘彼此之间在几条直线上接触形成对称的几对月牙腔，动涡旋盘在曲轴的驱动下绕静涡旋盘的涡旋体中心运动，使静涡旋盘与动涡旋盘的接触点沿涡旋曲面 移动实现吸气、压缩与排气。例如在双级无油涡旋真空泵中，有两个方向对应的静涡旋盘，一个位于两个涡旋盘之间的动涡旋盘。

下面(mian)以普通(tong)旋(xuan)(xuan)(xuan)(xuan)片真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)为(wei)(wei)例，说(shuo)明其(qi)差(cha)别：     无(wu)油(you)(you)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)主(zhu)要(yao)优点主(zhu)要(yao)包括：    ①.密(mi)封(feng)性(xing)良(liang)(liang)好,没(mei)有(you)(you)(you)向机械泵(beng)(beng)(beng)(beng)那样直接连接吸、排(pai)气(qi)腔的(de)(de)(de)(de)泄漏通(tong)道,容(rong)易密(mi)封(feng),容(rong)易达到(dao)较(jiao)(jiao)高(gao)的(de)(de)(de)(de)真(zhen)空(kong)(kong)(kong)度；    ②.回转半(ban)(ban)径小，动(dong)(dong)(dong)静(jing)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)盘(pan)相(xiang)对(dui)滑动(dong)(dong)(dong)速(su)度仅为(wei)(wei)旋(xuan)(xuan)(xuan)(xuan)片真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)1/7左(zuo)右，动(dong)(dong)(dong)静(jing)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)盘(pan)之间(jian)的(de)(de)(de)(de)动(dong)(dong)(dong)密(mi)封(feng)相(xiang)对(dui)容(rong)易，有(you)(you)(you)利于延长(zhang)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)使用(yong)(yong)(yong)(yong)(yong)寿命；    ③压(ya)(ya)缩(suo)(suo)进(jin)程(cheng)必较(jiao)(jiao)缓(huan)慢，有(you)(you)(you)2个或(huo)者3个压(ya)(ya)缩(suo)(suo)过程(cheng)同时进(jin)行(xing)，压(ya)(ya)缩(suo)(suo)腔相(xiang)对(dui)曲(qu)轴(zhou)对(dui)称，这(zhei)(zhei)样泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)运转过程(cheng)平稳、驱动(dong)(dong)(dong)力(li)矩(ju)和气(qi)体冲击波动(dong)(dong)(dong)小，使泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)噪(zao)(zao)音和振(zhen)(zhen)动(dong)(dong)(dong)降低(di)。   总而言之，无(wu)油(you)(you)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)结(jie)构简单、具(ju)有(you)(you)(you)较(jiao)(jiao)高(gao)的(de)(de)(de)(de)压(ya)(ya)缩(suo)(suo)比(bi)，在(zai)(zai)较(jiao)(jiao)宽的(de)(de)(de)(de)压(ya)(ya)力(li)范(fan)围内有(you)(you)(you)稳定(ding)的(de)(de)(de)(de)抽(chou)速(su)，工(gong)(gong)作压(ya)(ya)力(li)范(fan)围宽；动(dong)(dong)(dong)静(jing)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)盘(pan)之间(jian)间(jian)隙小、泄漏少，由(you)于压(ya)(ya)缩(suo)(suo)腔容(rong)积的(de)(de)(de)(de)变(bian)(bian)化(hua)是连续的(de)(de)(de)(de)，因而驱动(dong)(dong)(dong)扭矩(ju)变(bian)(bian)化(hua)小，功率变(bian)(bian)化(hua)小,振(zhen)(zhen)动(dong)(dong)(dong)噪(zao)(zao)声低(di)，可*性(xing)高(gao)。这(zhei)(zhei)是其(qi)它类型(xing)的(de)(de)(de)(de)干式真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)所不(bu)具(ju)备的(de)(de)(de)(de)。    由(you)于普通(tong)旋(xuan)(xuan)(xuan)(xuan)片油(you)(you)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)漏油(you)(you)、噪(zao)(zao)声、返(fan)油(you)(you)污(wu)(wu)染(ran)、高(gao)能耗(hao)以及振(zhen)(zhen)动(dong)(dong)(dong)等问(wen)题给用(yong)(yong)(yong)(yong)(yong)户造成(cheng)(cheng)(cheng)不(bu)良(liang)(liang)影(ying)响(xiang)，如生物制品行(xing)业与半(ban)(ban)导(dao)体行(xing)业的(de)(de)(de)(de)油(you)(you)蒸汽污(wu)(wu)染(ran)与工(gong)(gong)艺(yi)系统(tong)返(fan)油(you)(you)问(wen)题。真(zhen) 空(kong)(kong)(kong)镀(du)(du)膜(mo)设备的(de)(de)(de)(de)镀(du)(du)膜(mo)工(gong)(gong)艺(yi)中，在(zai)(zai)20～40Pa真(zhen)空(kong)(kong)(kong)条件下镀(du)(du)膜(mo)时，如果应(ying)用(yong)(yong)(yong)(yong)(yong)普通(tong)旋(xuan)(xuan)(xuan)(xuan)片机械真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)作为(wei)(wei)前级真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)将对(dui)镀(du)(du)膜(mo)工(gong)(gong)艺(yi)设备造成(cheng)(cheng)(cheng)污(wu)(wu)染(ran)，影(ying)响(xiang)成(cheng)(cheng)(cheng)膜(mo)质量。半(ban)(ban)导(dao)体 晶片制造工(gong)(gong)艺(yi)当(dang)中使用(yong)(yong)(yong)(yong)(yong)油(you)(you)泵(beng)(beng)(beng)(beng)与使用(yong)(yong)(yong)(yong)(yong)于泵(beng)(beng)(beng)(beng)相(xiang)比(bi)，成(cheng)(cheng)(cheng)品率存(cun)在(zai)(zai)明显(xian)的(de)(de)(de)(de)差(cha)距，并且排(pai)出的(de)(de)(de)(de)油(you)(you)雾蒸汽对(dui)环境也(ye)(ye)有(you)(you)(you)污(wu)(wu)染(ran).科学仪器(qi)行(xing)业尤其(qi)是在(zai)(zai)分析测试(shi)仪器(qi)行(xing)业，采用(yong)(yong)(yong)(yong)(yong)油(you)(you)泵(beng)(beng)(beng)(beng)对(dui) 测试(shi)结(jie)果将造成(cheng)(cheng)(cheng)不(bu)良(liang)(liang)影(ying)响(xiang)。大(da)型(xing)同步辐射光束线上采用(yong)(yong)(yong)(yong)(yong)无(wu)油(you)(you)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)作为(wei)(wei)前级真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)作用(yong)(yong)(yong)(yong)(yong)也(ye)(ye)相(xiang)当(dang)明显(xian)。另(ling)外无(wu)油(you)(you)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)消除了普通(tong)油(you)(you)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)漏油(you)(you)给用(yong)(yong)(yong)(yong)(yong)户带来的(de)(de)(de)(de) 环境污(wu)(wu)染(ran)与烦恼。现(xian)有(you)(you)(you)无(wu)油(you)(you)涡(wo)(wo)旋(xuan)(xuan)(xuan)(xuan)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)用(yong)(yong)(yong)(yong)(yong)户的(de)(de)(de)(de)使用(yong)(yong)(yong)(yong)(yong)情况也(ye)(ye)证明了这(zhei)(zhei)种(zhong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)(de)优越性(xing)。